Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6846964
Kind Code:
B2
Abstract:
A substrate processing device 1 comprises a housing 11, a lid 13, a pressing member 6, a fastener 7, and a manual adjustment part 8. The housing 11 has an opening in the upper surface thereof. The lid 13 opens and closes the opening of the housing 11 by attaching to and detaching from the housing 11. The pressing member 6 has a first end part 21 and a second end part 22. The pressing member 6 presses the lid 13 against the housing 11. The fastener 7 contacts the first end part 21 of the pressing member 6, and prohibits the first end part 21 from moving upward. The manual adjustment part 8 adjusts the height position of the second end part 22 of the pressing member 6 by a user operation.
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Inventors:
Fukumoto Yasuhiro
Yuji Tanaka
Takeharu Ishii
Tomohiro Matsuo
Yuji Tanaka
Takeharu Ishii
Tomohiro Matsuo
Application Number:
JP2017051515A
Publication Date:
March 24, 2021
Filing Date:
March 16, 2017
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/31; H01L21/027
Domestic Patent References:
| JP20003843A | ||||
| JP2001110876A | ||||
| JP2015185657A | ||||
| JP201422570A |
Foreign References:
| US6013316 | ||||
| US20160068951 | ||||
| US20170040188 | ||||
| US20160076149 | ||||
| US20150140835 | ||||
| US20150235812 | ||||
| US20140022521 |
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Nobuyoshi Aono
Hiroyuki Todaka
Tomohiko Sugitani
Kurihara Kaname
Nobuyoshi Aono