Title:
CANTILEVER OSCILLATION CHARACTERISTIC MEASUREMENT METHOD AND OSCILLATION CHARACTERISTIC MEASUREMENT PROGRAM
Document Type and Number:
Japanese Patent JP2015194345
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cantilever oscillation characteristic measurement method and oscillation characteristic measurement program that enable a Q value serving as an oscillation characteristic of a cantilever of a scanning type probe microscope to be measured with excellent accuracy without relying on a measurement condition of a Q curve.SOLUTION: A cantilever oscillation characteristic measurement method is configured to: measure oscillation amplitude V when applying an oscillation of a resonance frequency f1(Hz) to a cantilever 1 of a scanning type probe microscope 200; obtain a time Th (second) when the oscillation amplitude V is equal to or more than 0.90 of steady-state amplitude V0; and calculate a Q value by a following expression 1:Q value=f1*Th.
Inventors:
SHIGENO MASAJI
SHIKAKURA YOSHIAKI
SHIKAKURA YOSHIAKI
Application Number:
JP2014071071A
Publication Date:
November 05, 2015
Filing Date:
March 31, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH SCIENCE CORP
International Classes:
G01Q60/32
Domestic Patent References:
| JP2004163392A | 2004-06-10 | |||
| JP2002277378A | 2002-09-25 | |||
| JP2004163392A | 2004-06-10 | |||
| JP2002277378A | 2002-09-25 |
Foreign References:
| US20050188752A1 | 2005-09-01 | |||
| US20050188752A1 | 2005-09-01 |
Attorney, Agent or Firm:
Kenichiro Akao
Akira Shimoda
Kazuhiko Kurihara
Akira Shimoda
Kazuhiko Kurihara