Title:
CAPACITY TYPE SENSOR
Document Type and Number:
Japanese Patent JP3329060
Kind Code:
B2
Abstract:
PURPOSE: To enlarge a dynamic capacity detecting range of a capacity type sensor to enhance reliability of capacity detection.
CONSTITUTION: An input circuit 6 using switches &phiv 1, &phiv 2 is provided on an input side of a capacity detecting part l, and a switched capacitor circuit 7 is connected to an output side of the capacity detecting part 1. A servo circuit 8 and an addition/subtraction circuit 10 are interposed between the switched capacitor circuit 7 and the input circuit 6. Capacitors C1, C2 of the capacity detecting part 1 are composed of fixed electrodes opposingly arranged on both sides of a movable electrode. Capacity change due to displacement of the movable electrode because of acceleration is converted to voltage by the switched capacitor circuit 7 to be outputted as an acceleration detection signal. For the acceleration detection signal, feedback electrostatic force is applied to the movable electrode via the servo circuit 8 and the addition/subtraction circuit 10 so as to restrict and support the movable electrode at a neutral position constantly by means of a voltage amplitude control system.
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Inventors:
Tomio Shibano
Nobuhiro Ito
Nobuhiro Ito
Application Number:
JP7669094A
Publication Date:
September 30, 2002
Filing Date:
March 22, 1994
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01L1/14; B81B3/00; G01D5/24; G01R27/26; (IPC1-7): G01D5/24; G01L1/14; G01R27/26
Domestic Patent References:
| JP2110383A |
Attorney, Agent or Firm:
Kiyoshi Igarashi
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