Title:
CATHODE FORMATION BODY, ELECTRON GUN, AND LITHOGRAPHY SYSTEM HAVING SUCH ELECTRON GUN
Document Type and Number:
Japanese Patent JP2018032861
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electron gun thermionic cathode for electron beam lithography having favorable performance over improved lifetime for a longer period.SOLUTION: A cathode formation body 20 is provided including: a thermionic cathode having an emission section 30 on which an emission surface 32 for emitting electrons is provided and a reservoir 38 for holding a material for emitting a work function reducing particles 70 that diffuse toward an emission section when heated to be emitted from an emission surface with a first evaporation rate; a convergence electrode 40 having a convergence surface for converging electrons emitted from the emission surface of the cathode; and an adjustable heat source 50 that is configured to keep the convergence surface at a temperature at which accumulation of the work function reducing particles on the convergence surface is prevented.SELECTED DRAWING: Figure 1a
Inventors:
LAURA DINU-GUNTLER
ERIC PETRUS HOGERVORST
ERIC PETRUS HOGERVORST
Application Number:
JP2017171156A
Publication Date:
March 01, 2018
Filing Date:
September 06, 2017
Export Citation:
Assignee:
MAPPER LITHOGRAPHY IP BV
International Classes:
H01L21/027; G03F7/20; H01J1/20; H01J1/28; H01J3/18; H01J37/06; H01J37/305
Domestic Patent References:
| JP2009187767A | 2009-08-20 | |||
| JPS5851438A | 1983-03-26 | |||
| JPS5533719A | 1980-03-10 | |||
| JP2003346671A | 2003-12-05 | |||
| JP2017501553A | 2017-01-12 |
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Naoki Kono
Tadashi Inoue
Ukai Ken
Shigeru Iino
Nobuhisa Nogawa
Naoki Kono
Tadashi Inoue
Ukai Ken
Shigeru Iino