To provide a certifying method of a medicinal solution capable of accurately certifying the right and wrong of the medicinal solution (resist solution) for use in manufacture of a semiconductor device.
The method comprises the processes of estimating, by measurement, the number of particles for every size of a particle (particle diameter) in the medicinal solution; predicting the degree of an influence given by the medicinal solution to a semiconductor device manufactured using the medicinal solution for every particle size; calculating an influence given by the semiconductor device by the medicinal solution using results of the foregoing two processes, evaluating the quality of the medicinal solution, judging the right and wrong of the medicinal solution on the basis of an evaluated result, and certifying the medicinal solution as a medicinal solution used for a predetermined semiconductor manufacturing process.
AOYAMA TOSHIKO
SHIOBARA HIDESHI
ITO SHINICHI
| JPH10209024A | 1998-08-07 | |||
| JPH05251328A | 1993-09-28 | |||
| JPH11147068A | 1999-06-02 | |||
| JP2003315245A | 2003-11-06 |
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Next Patent: SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD