Title:
荷電ビーム装置および荷電粒子検出方法
Document Type and Number:
Japanese Patent JP4092280
Kind Code:
B2
Abstract:
A charged particle beam apparatus includes: a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen; a demagnification optical system which demagnifies the charged particle beam; a deflector which deflects the charged particle beam to scan the specimen; and a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam; wherein the detection surface of the first charged particle detector is disposed so as to face towards the charged particle beam source.
More Like This:
| JP3804416 | ELECTRON BEAM IRRADIATING UNIT |
| JP7194053 | Ion generator and ion implanter |
| WO/2021/210239 | ENERGY BEAM IRRADIATION DEVICE |
Inventors:
Osamu Nagano
Atsushi Ando
Atsushi Ando
Application Number:
JP2003363242A
Publication Date:
May 28, 2008
Filing Date:
October 23, 2003
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G21K5/04; G01N23/225; H01J37/08; H01J37/244; H01J37/20; H01J37/305; H01L21/027; H01L21/66
Domestic Patent References:
| JP2003297715A | ||||
| JP63020354U | ||||
| JP2002530833A |
Foreign References:
| WO1998013854A1 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hakozaki Yukio
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hakozaki Yukio