CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION METHOD

Title:

CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION METHOD

Document Type and Number:

Japanese Patent JP3968334

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus in which there is few degradation of resolution even if the beam is slanted toward a sample.
SOLUTION: The orbit of the primary beam 4 against a plurality of lenses 6, 7 is made to pass through to the outside of axis by means of a deflector or a movable throttling, and by controlling its outside-the-axis orbit, a means is equipped to cancel aberration which is generated at the objective lens 7 at beam tilting by means of aberration of another lens 6.

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Inventors:

Yoichi Ose
Mitsugi Sato
Hideo Tosho
Makoto Esumi
Noriaki Arai
Toi Takashi

Application Number:

JP2003305267A

Publication Date:

August 29, 2007

Filing Date:

August 28, 2003

Export Citation:

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Assignee:

Hitachi High-Technologies Corporation

International Classes:

H01J37/153; G01Q20/02; G01Q30/02; H01J3/14; H01J29/70; H01J37/09; H01J37/28; G01Q10/00; (IPC1-7): H01J37/153; H01J37/28

Domestic Patent References:

JP50002354B1
JP2000306537A
JP51076963A
JP58094251U
JP2003297724A
JP2004014207A

Attorney, Agent or Firm:

Yusuke Hiraki

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