To provide a charged particle beam device capable of obtaining a superior transmission image even in the case of using positrons regarding the charged particle beam device.
This is equipped with a focusing lens 2 of at least one stage to focus a charged particle beam, a retaining mechanism 3 of a sample arranged on a downstream side than the focusing lens 2, a driving mechanism of the sample to carry out insertion/extraction of the sample against a passage of the charged particle beam, an image forming lens 4 of at least one stage arranged on the downstream side than the sample, a means of memorizing the transmission image on the image forming face obtained by inserting the sample into a beam passage, and a transmission image calculating means of obtaining the transmission image in which from the transmission image and a probe image, at least one of ununiformity of current density distribution of a charged particle probe on a sample face and ununiformity of detection sensitivity on the image forming face is corrected.
| JP2022104896 | DATA ACQUISITION AND PROCESSING TECHNIQUES FOR THREE-DIMENSIONAL RECONSTRUCTION |
| JPH09212647 | PICTURE PROCESSOR |
| JP7007136 | Tomographic imaging method |
OTSUKA TAKASHI
MATSUTANI MIYUKI
INOUE MASAO
JEOL LTD
Nobushige Samejima