Title:
CLEAN ROOM FACILITY
Document Type and Number:
Japanese Patent JP3855197
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize a form suitable to application to clean room facility having comparatively middle and small scale.
SOLUTION: This clean room facility is provided with a clean room 1, an auxiliary machinery space 2 for installing auxiliary machinery of equipment installed in the clean room, and a machine room 4 for installing facility such as an air conditioner. The whole facility is constituted into one-storied facility, and the auxiliary machinery space 2 and the machine room 4 are arranged on a side of the clean room 1. A floor 5 of the clean room 1 is supported from a foundation installed on the ground through a strut member 8.
Inventors:
Tadashi Kato
Takeshi Sekiguchi
Kyoichi Ogawa
Takeshi Sekiguchi
Kyoichi Ogawa
Application Number:
JP2002273357A
Publication Date:
December 06, 2006
Filing Date:
September 19, 2002
Export Citation:
Assignee:
Shimizu Construction Co., Ltd.
International Classes:
E04H5/02; F24F7/06; (IPC1-7): F24F7/06; E04H5/02
Domestic Patent References:
| JP2002097808A | ||||
| JP2001336297A | ||||
| JP60150207U |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
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