CLEANER FOR CLEAN ROOM - MITSUBISHI MATERIAL SILICON

Title:

CLEANER FOR CLEAN ROOM

Document Type and Number:

Japanese Patent JP2001149870

Kind Code:

A

Abstract:

To provide a handy cleaner for clean rooms capable of cleaning without leaving few stains stuck to materials to be cleaned.

Not only dust on the floor of a clean room is sucked, but in such a case that stains are stuck onto a table 26 in a clean room, the stains are wiped off clean by pressing a wiper tool 25 made wet by supplying pure water in a storage tank 20 with a bellows-type pump 21 installed with an intake opening 13a on the stained portion of the table 26. As a result, the stains can be wiped off cleanly without leaving few stains stuck to the table 26.

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Inventors:

FUKUMOTO HAYAAKI
ENDO TAKAKO
USUKURA MIYUKI
TAWARA SHIGEKO
HAYASHI YUKIO

Application Number:

JP34199499A

Publication Date:

June 05, 2001

Filing Date:

December 01, 1999

Export Citation:

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