PURPOSE: To advantageously realize uniform ashing within a short treatment time at a low cost by holding the pressure of a reaction gas to a low pressure within a predetermined range during a period when plasma distribution is uniform and reducing the same to a lower pressure as compared with the low pressure within the predetermined range in the vicinity of a point of time when a non-uniform region is generated.
CONSTITUTION: When an elastomer residue formed on the surface of a mold is removed by ashing, a central electrode 4 is allowed to protrude into a treatment tank 1 and an annular vulcanizing mold 15 is positioned around the electrode 4 as other electrode so as to be spaced apart from the electrode 4 by a predetermined distance and power is applied across both electrodes 4, 15 to generate plasma by discharge. The pressure of the reaction gas from a reaction gas supply pipe 9 is held to a low pressure within a predetermined range from the start of discharge during a period when the plasma distribution between both electrodes 4, 15 is uniform in such a state that the inflow and outflow amts. of the reaction gas are well-balanced and, in the vicinity of a point of time when a non-uniform region is generated, the pressure of the reaction gas is reduced to lower pressure as compared with the low pressure within the predetermined range.
| JP3526204 | ULTRAVIOLET WASHING MACHINE |
| JPH1147708 | CLEANING METHOD |
| JP2006205085 | PLASMA PROCESSING APPARATUS |
SAITO SHINJI
YOSHIKAWA MASAHITO
NOHARA YOSHIO
HIROSE KOJI
Next Patent: INSERT FOR FORM MOLDING AND PRODUCTION OF FORMED MOLDED PRODUCT