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Patent Searching and Data


Title:
COATING FILM FORMING DEVICE
Document Type and Number:
Japanese Patent JPH03118870
Kind Code:
A
Abstract:

PURPOSE: To accurately position a device by fixing a supporting member to the flank of a conveyor rotating at a constant pitch and providing a disk receiving pan at the tip of the supporting member.

CONSTITUTION: The conveyor 11 is moved by a driving motor 4 at the appropriate speed suitable for UV irradiation by one pitch, and the disk receiving pan 3 at a disk inlet position 6 is moved to a disk discharging position 8, the pan 3 at the disk discharging position 8 to a standby position 12 and the pan 3 at the standby position 12 to the disk loading position 6. In this process, the disk 7 on the pan 3 at the disk loading position is irradiated with the UV from an UV irradiation device 9, the coating film is cured, and the disk is sent to the disk discharging position 8. The disk 7 on the pan 3 is conveyed to another station from the disk discharging port. Consequently, the leakage of UV is reduced.


Inventors:
NOSAKA TOSHIO
Application Number:
JP25740089A
Publication Date:
May 21, 1991
Filing Date:
October 02, 1989
Export Citation:
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Assignee:
ORIGIN ELECTRIC
International Classes:
B05C9/12; B05C11/08; B05C13/02; G11B5/84; G11B7/26; H01L21/027; (IPC1-7): B05C9/12; B05C11/08; B05C13/02; G11B5/84; G11B7/26; H01L21/027