To provide a cold cathode field electron emission element, having a low threshold potential, of a lower manufacturing cost, with its manufacturing process being less complex, easily coping with jumboizing of a cold cathode field electron emission display device.
The cold cathode field electron emission element comprises a cathode electrode 11 formed on a supporter 10, and insulating layer 12 formed on the supporter 10 and cathode electrode 11, a gate electrode 13 formed on the insulating layer 12, openings 14A and 14B penetrating the gate electrode 13 and insulating layer 12, and an electron emission part 15 formed on the cathode electrode 11 positioned at the bottom of the opening 14B. The electron emission part 15 comprises a plurality of granular materials 20, and a thin film 21 for fitting the granular material 20 on the surface of the cathode electrode 11.
SAITO ICHIRO
Next Patent: MIS/MIM ELECTRON EMITTER