Title:
COMPOSITE SUBSTRATE
Document Type and Number:
Japanese Patent JP2014195026
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a composite substrate having a high-performance functional layer.SOLUTION: The method of manufacturing a composite substrate includes: a normal-temperature bonding step of bringing a first substrate into contact with a second substrate made of a material having a lattice constant different from that of a material constituting the first substrate after activating respective surfaces of the first substrate and the second substrate, thereby bonding them together; a functional layer forming step of thinning the first substrate to form a functional layer having a desired thickness; and a heating step of heating the functional layer and the second substrate in a heating furnace at a temperature equal to or higher than the eutectic temperature between an element of the material constituting the first substrate and an element of the material constituting the second substrate after the functional layer forming step.
Inventors:
NAGANO TOMOYA
Application Number:
JP2013071254A
Publication Date:
October 09, 2014
Filing Date:
March 29, 2013
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L27/12; B23K20/00; H01L21/02; H01L21/20
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