To provide a conveying device and method for conveying a held object having a held surface deformed by various kinds of factors such as heat in a surely holding state.

A conveying arm A conveys the held object in the holding state by making a holding surface abut on the held surface of the held object. The conveying arm A is provided with a wafer supporting part 2 provided with a wafer suction hole 6. The wafer supporting part 2 is constituted to be rotatable by a prescribed width with a base end part 2a of the wafer supporting part 2 as a center.