CONVEYING DEVICE

Japanese Patent JP2005022860

A

To provide a conveying device enhancing ease of handling.

An air-blowing type support means 3 for blowing air toward a lower surface part of an article 2 to be conveyed and supporting the article 2 to be conveyed in the non-contact state; and a driving force imparting means for imparting driving force in a conveying direction against the article 2 to be conveyed supported by the air-blowing type support means 3 are provided. The air-blowing type support means is provided with a dust removal filter 5 for removing dusts; and a fan means 6 for blowing clean air toward the lower surface part of the article to be conveyed through the dust removal filter 5. The fan means 6 is constituted so that an air-blowing amount of air blown toward the lower surface part of the article to be conveyed can be changed to a support air-blowing amount for supporting the article 2 to be conveyed in the non-contact state and an air-blowing amount different from the support air-blowing amount.

JP2009161283	LEVITATING UNIT AND DEVICE
JPS5918653	AUTOMATIC SUPPLIER FOR WAFER
JP2007051001	METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE MATERIAL

MORIYA SUSUMU
MURAYAMA SHIGETO
MORIMOTO YUICHI

JP2003270686A

January 27, 2005

July 03, 2003

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DAIFUKU KK

B65G51/03; B65G49/06; H01L21/677; H01L21/68; (IPC1-7): B65G51/03; B65G49/06; H01L21/68

Shuichiro Kitamura

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