Title:
COUPLING DEVICE FOR COUPLING ROTATING BODY TO ROTATING SHAFT, AND DEVICE FOR ATTACHING AND DETACHING ROTATING BODY
Document Type and Number:
Japanese Patent JP2023141940
Kind Code:
A
Abstract:
To provide a coupling device for easily attaching and detaching a rotating body to and from a rotating shaft.SOLUTION: A coupling device 40 is used to couple a rotating body 7 to a rotating shaft 23. The coupling device 40 comprises: a flange 45 which is attached to the rotating body 7 and has a coupling shaft 45a; and a fastening structure 50 which fastens the rotating body 7 to the rotating shaft 23 via the coupling shaft 45a.SELECTED DRAWING: Figure 2
More Like This:
| JP4624293 | CMP pad conditioner |
| JP2006055944 | CMP PAD CONDITIONER |
| JP4346816 | Substrate polishing |
Inventors:
ITO BAN
TERADA TETSUYA
TERADA TETSUYA
Application Number:
JP2022048535A
Publication Date:
October 05, 2023
Filing Date:
March 24, 2022
Export Citation:
Assignee:
EBARA CORP
International Classes:
B24B53/017; B23B31/107; B23B31/11; B23B31/113; B23B31/20; B23Q3/157; B24B37/30; B24B45/00; B24B53/12; F16D1/00; F16D1/04; F16D1/06; F16D1/092; F16D1/093; H01L21/304
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa