Title:
切断装置及び切断品の製造方法
Document Type and Number:
Japanese Patent JP7394712
Kind Code:
B2
Abstract:
A cutting device is equipped with a spindle part, a control part, and a measuring device. The spindle part can adjust the height position, and the blade is installed therein. The measuring device is configured to measure the height position of the upper surface of an object. The control part controls the spindle part to form a temporary groove in the object based on the height position of the object measured by the measuring device. The control part adjusts the height position of the spindle part based on the height position of the temporary groove portion measured by the measuring device, and then controls the spindle part so that a groove may be formed in a workpiece based on the height position in each of a plurality of locations on the upper surface of the workpiece measured by the measuring device. The present invention is to provide the cutting device and the manufacturing method of a cut product that can more reliably form a groove of a desired depth on a workpiece.
Inventors:
Ichiro Imai
Shinji Sakamoto
Shoma Ohnishi
Shinji Sakamoto
Shoma Ohnishi
Application Number:
JP2020109118A
Publication Date:
December 08, 2023
Filing Date:
June 24, 2020
Export Citation:
Assignee:
towa corporation
International Classes:
B24B27/06; B24B47/22; B24B49/02; B24B49/12; B24B49/18; B24B53/00; B26D7/26; H01L21/301
Domestic Patent References:
| JP2011181623A | ||||
| JP2019118983A | ||||
| JP2018206995A | ||||
| JP2016201452A |
Foreign References:
| US20190202018 |
Attorney, Agent or Firm:
Kenji Tachibana
Go Masuda
Go Masuda