Title:
DEFLECTOR AND MANUFACTURING METHOD OF THE SAME, AND CHARGED PARTICLE EXPOSING DEVICE
Document Type and Number:
Japanese Patent JP2003031172
Kind Code:
A
Abstract:
To provide a deflector forming a storing deflection field with small current which is stable against the temperature variation, slightly affected by eddy current, with small aberration depending on a geometric accuracy of a coil and a core, and to provide a manufacturing method of the same.
A magnetic tape lamination body is used as a core of a deflector. The positioning of a coil and the magnetic tape lamination body is carried out by using light formation method and electroforming. Further, the magnetic tape lamination body is positioned by using a resist pattern formed by lithography.
Inventors:
NAKANO KATSUSHI
Application Number:
JP2001214792A
Publication Date:
January 31, 2003
Filing Date:
July 16, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; H01B13/00; H01F7/06; H01J3/14; H01J37/147; H01J37/305; H01L21/027; H01F7/20; (IPC1-7): H01J37/147; G03F7/20; H01J37/305; H01L21/027
Domestic Patent References:
| JPH11121241A | 1999-04-30 | |||
| JPH1080410A | 1998-03-31 | |||
| JPH08148410A | 1996-06-07 |