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Title:
DISCHARGE PLASMA ELECTRODE AND DISCHARGE PLASMA TREATMENT APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2003168596
Kind Code:
A
Abstract:

To provide a discharge plasma electrode equipped with a mechanism which can efficiently cool the electrode from the outside without providing a duct line for a cooling medium within the electrode, and a discharge plasma treatment apparatus using this electrode.

The discharge plasma electrode is equipped with a cooling fin composed of metal projections on a back surface of an electrode discharge surface and has such a cooling mechanism as a cooling medium is sprayed on the back surface of the electrode discharge surface. The electrode can be very thinned to save the weight thereof. The discharge plasma treatment apparatus uses this discharge plasma electrode as at least one of a pair of plasma discharge electrodes.


Inventors:
IWANE KAZUYOSHI
Application Number:
JP2001364590A
Publication Date:
June 13, 2003
Filing Date:
November 29, 2001
Export Citation:
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Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
H05H1/46; B01J19/08; (IPC1-7): H05H1/46; B01J19/08