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Title:
DISPLAY AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2010078632
Kind Code:
A
Abstract:

To provide a display that can have a gate insulating film of a thin film transistor and an inter-layer insulating film at a wiring intersection part formed to suitable thicknesses respectively without increasing mask processes.

The method of manufacturing the display includes the processes of: forming first and second thin film transistors on an insulating substrate; forming the gate insulating film covering a gate electrode of the first thin film transistor, a gate electrode of the second thin film transistor, and a gate signal line; forming a dehydrogenated first amorphous silicon semiconductor layer on the insulating film; altering the first amorphous silicon semiconductor layer in a formation region of the first thin film transistor into a polycrystalline silicon semiconductor layer; etching the amorphous silicon semiconductor layer in a formation region of the first thin film transistor and a part of the insulating film from a surface in order; and forming a second amorphous silicon semiconductor layer on the insulating film while covering the polycrystalline silicon semiconductor layer and first amorphous silicon semiconductor layer.


Inventors:
SONODA DAISUKE
KURIYAGAWA TAKESHI
MIYAKE HIDEKAZU
KAITO TAKUO
Application Number:
JP2008243602A
Publication Date:
April 08, 2010
Filing Date:
September 24, 2008
Export Citation:
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Assignee:
HITACHI DISPLAYS LTD
International Classes:
G09F9/30; G02F1/1362; H01L21/336; H01L21/8234; H01L27/06; H01L27/08; H01L29/786
Attorney, Agent or Firm:
Yasushi Kobayashi