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Title:
走査型プローブ顕微鏡の探針と試料表面との距離測定方法及び走査型プローブ顕微鏡
Document Type and Number:
Japanese Patent JP4571554
Kind Code:
B2
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Inventors:
Hideo Kojima
Application Number:
JP2005219116A
Publication Date:
October 27, 2010
Filing Date:
July 28, 2005
Export Citation:
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Assignee:
JEOL Ltd.
International Classes:
G01Q10/02; G01B21/30; G01Q10/04; G01Q60/24; G01Q60/26; G01Q60/32
Domestic Patent References:
JP9101317A
JP10282127A
JP2005164278A
JP2005140782A
JP10239328A
JP674754A
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima



 
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