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Title:
DOUBLE-FACE POLISHING DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP2003094319
Kind Code:
A
Abstract:

To provide a double-face polishing device and method capable of efficiently polishing works in a short time and uniformizing their thickness in a plurality of works to be polished simultaneously.

An surface plate 11 is partially suspended by a plurality of flexible suspension members 211 so as to contact with a thicker work 16h at a higher pressure. This constitution can widen a high polishing speed from the thick work to the thin work in order with the polishing, thereby polishing the respective works 16 into mutually equal thickness.


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Inventors:
IKEMOTO KIYOSHI
OKUDA YOHEI
Application Number:
JP2001293562A
Publication Date:
April 03, 2003
Filing Date:
September 26, 2001
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/005; B24B37/08; (IPC1-7): B24B37/00; B24B37/04
Attorney, Agent or Firm:
Amano Masakage (1 person outside)