Title:
DRESSING DEVICE
Document Type and Number:
Japanese Patent JP2023084039
Kind Code:
A
Abstract:
To provide a dressing device enabling improvement of flatness of a polishing pad and enabling uniformization of shaving quantity of the polishing pad when dressing.SOLUTION: A dressing device 1 is provided, comprising a dresser 3 dressing a polishing pad 11a which is mounted to an upper surface plate 11 and polishes a workpiece, the dresser 3 has a first dressing surface 31 opposed to the polishing pad 11a, and a first area 33 which provides prescribed dressing force and a second area 34 which provides dressing force lower than that of the first area 33 are set on the first dressing surface 31. The first area 33 and the second area 34 are juxtaposed in the surface plate circumferential direction X, and the first area 33 is arranged on one end portion 31a side in the surface plate circumferential direction. X. A compartment line 35 partitioning the first area 33 and the second area 34 has a third corner portion 35c set in a position nearer to one end portion 31a in the surface plate circumferential direction X more than a first corner portion 35a and a second corner portion 35b on both ends in the surface plate radial direction Y in an intermediate portion in the surface plate radial direction Y.SELECTED DRAWING: Figure 5
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Inventors:
INOUE YUSUKE
ODAGIRI SHIGERU
TAYAMA YU
TAKEI YUKI
ODAGIRI SHIGERU
TAYAMA YU
TAKEI YUKI
Application Number:
JP2021198135A
Publication Date:
June 16, 2023
Filing Date:
December 06, 2021
Export Citation:
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B53/017; B24B53/00; B24B53/12; H01L21/304
Attorney, Agent or Firm:
Cleo International Law & Patent Office