To provide an electric field emission array and its manufacturing method, which utilize a carbon nanotube and which can take the place of an existing microchip as an electron emitting source.
In the field emission array and the manufacturing method utilizing the carbon nanotube 11', a rear face substrate structural body 100 is formed including a negative electrode 11 and the carbon nanotube 11' formed on a rear face substrate in strip-shapes, a positive electrode 21 and a fluorescent substance 22 are sequentially formed on a front face substrate 20 in stripe- shapes, holes are formed on a non-conductive plate 23, and after a front face substrate structural body 200 is formed via a spacer 25 in order to retain a predetermined distance between the non-conductive plate 23 and the front face substrate 20 by forming stripe-shaped gates having openings corresponding to these holes, a stage is included that the rear face substrate structural body 100 and the front face substrate structural body 200 are joined in order that the gate and the carbon nanotube 11' have the predetermined distance by the carbon nanotubes 11' entering into the holes.
YUN MIN-JAE
JIN YONG-WAN
| JP2000086219A | 2000-03-28 | |||
| JPH05507580A | 1993-10-28 | |||
| JPH10149760A | 1998-06-02 | |||
| JPH04264337A | 1992-09-21 | |||
| JPH09504642A | 1997-05-06 |
| WO1999005692A1 | 1999-02-04 |
Next Patent: SEMICONDUCTOR COLD CATHODE