Title:
ELECTRICAL CAPACITANCE PRESSURE SENSOR, SENSOR ELEMENT AND MANUFACTURING METHOD FOR SENSOR ELEMENT
Document Type and Number:
Japanese Patent JP3756769
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent electrodes from closely adhering to each other even if a distorted part of a diaphragm is displaced when it is opened to the air so as to facilitate handling in manufacturing and shipping, to widen a pressure range, and to improve temperature characteristic by decreasing influence of a temperature change.
SOLUTION: A movable plate 25 is joined to the center of the distorted part 23A on the surface of a vacuum chamber 31 side of the diaphragm 23, the outer peripheral part of the movable plate 25 and a fixed part 23B of the diaphragm 23 are made close and opposite to each other, a movable electrode 27 and a fixed electrode 26 are formed on the opposite surfaces, a closed space surrounded by a base plate 21, a holding member 22 and a diaphragm 23 is evacuated to form a vacuum chamber 31.
More Like This:
| JPH11160181 | ELECTROSTATIC CAPACITY TYPE SENSOR |
Inventors:
Yoshiyuki Ishikura
Application Number:
JP2001065026A
Publication Date:
March 15, 2006
Filing Date:
March 08, 2001
Export Citation:
Assignee:
YAMATAKE CORPORATION
International Classes:
G01L9/12; B81B3/00; G01L19/06; G01L19/14; (IPC1-7): G01L9/12; B81B3/00; G01L19/06; G01L19/14
Domestic Patent References:
| JP58136746U | ||||
| JP9033372A |
Attorney, Agent or Firm:
Masaki Yamakawa