To provide an electromagnetic vibratory type diaphragm pump wherein nonlinear vibration which is an abnormal phenomenon occurring due to a springing characteristic of a diaphragm being nonlinear is prevented.
The electromagnetic vibratory type diaphragm pump comprises electromagnetic parts having electromagnets arranged opposingly inside a frame, a vibrator equipped with magnets and supported inside the electromagnetic parts, the diaphragm connected to both ends of the vibrator, and a pump casing part fixed to both ends of the electromagnetic parts. A communication hole communicated with the electromagnetic parts and a hermetic space hermetically sealed by the diaphragm is formed, and the pressure generated in the pump casing part is impressed as back pressure to the diaphragm through the communication hole.
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OYA IKUO
KOMURO KOICHI
ISHII HIDEKI
