PURPOSE: To obtain an exposure device which is capable of reducing the occupied area for increased photosensitive substrates from the outside when it is set up and making quick transfer and replacement even if they are increased in size.

CONSTITUTION: A photosensitive substrate 2 transferred being kept horizontal in position is placed upright in position by a erecting means 4, the substrate 2 held vertical in position is rectilinearly moved to a vertical holding surface 11 of a substrate stage 8 and held by transfer means 29 and 30 provided above the erecting means 4. By this setup, a multiaxial transfer system is capable of being formed much smaller in size and an area occupied by it as compared with a conventional articulated robot.