FAN FILTER UNIT INSTALLATION STRUCTURE AND CLEAN ROOM CEILING STRUCTURE

Japanese Patent JP3963729

B2

PROBLEM TO BE SOLVED: To surely prevent the leakage of electromagnetic waves at the location where a fan filter unit is installed to the ceiling.
SOLUTION: In this structure, a fan filter unit 20 is installed to a lattice window 18 of a lattice ceiling 16 consisting of conductive materials. Shield packing 30 of which gasket and outer periphery are wrapped with metal foil outer film is interposed between the fan filter unit 20 and the frames of the lattice window 18, on which the fan filter unit is mounted, and is installed with airtight seal while an electromagnetic shield is created between the lattice ceiling 16 and a casing 44 of the fan filter unit 20.

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Tadahiro Ohmi
Yasuyuki Shirai
Hanaoka Hideo
Kikuji Kobayashi
Ken Homma
Kunihiro Shibata
Kazuo Saito
Kudo Masamitsu
Shinobu Tomikawa

JP2002016256A

August 22, 2007

January 24, 2002

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Tadahiro Ohmi
Hitachi Plant Technology Co., Ltd.
Takasago Thermal Engineering Co., Ltd.

E04B1/92; F24F7/06; H05K9/00; (IPC1-7): F24F7/06; E04B1/92; H05K9/00

JP2000088307A
JP11324528A
JP2000328691A
JP2000120208A
JP2001041520A
JP10145075A

Yuichi Murakami
Okubo Misao

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