Title:
FEEDTHROUGH
Document Type and Number:
Japanese Patent JP2004103510
Kind Code:
A
Abstract:
To provide a feedthrough in which many pieces of electric wires can be introduced into the vacuum container with small area, while holding vacuum with respect to the vacuum container.
The feedthrough is constituted of an airtight current leading terminal 1 that, by providing a vacuum space between the atmosphere and a vacuum container, separates the atmosphere and the vacuum space, an airtight current leading terminal 2 that separates the space inside the vacuum container and the vacuum space, and a wiring that is connected to the above airtight current leading terminal 1 and the airtight current leading terminal 2 and arranged inside the vacuum space. Thus, the current can be introduced into the vacuum container from the atmosphere.
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Inventors:
MUROFUSHI YASUNOBU
ARIGA TORU
ARIGA TORU
Application Number:
JP2002267049A
Publication Date:
April 02, 2004
Filing Date:
September 12, 2002
Export Citation:
Assignee:
CANON KK
International Classes:
H01J31/12; (IPC1-7): H01J31/12
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio
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