Title:
FIRING FURNACE
Document Type and Number:
Japanese Patent JP2016186389
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a firing furnace which heats and fires a substrate in a uniform manner without heating a device to a high temperature despite of having a simple structure.SOLUTION: A firing furnace includes: a furnace body 10 made of stainless steel; lamp heaters 13 disposed below a substrate 100; a water-cooling cooling plate 11 disposed below the lamp heaters 13; lamp heaters 14 disposed above the substrate 100; and a water-cooling cooling plate 12 disposed above the lamp heaters 14. When the substrate 100 is heated, exhaust airflow, which flows from an opening part 25 formed at a lower part of a heat insulation plate 21 and an opening part 15 formed at a lower part of the furnace body 10 and reaches an exhaust port 17 through a firing space of the furnace body 10, is formed.SELECTED DRAWING: Figure 1
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Inventors:
HORIKOSHI AKIRA
Application Number:
JP2015066440A
Publication Date:
October 27, 2016
Filing Date:
March 27, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F27B17/00; F27D9/00; F27D11/02; H01L21/26
Domestic Patent References:
| JP2001044129A | 2001-02-16 | |||
| JP2002359207A | 2002-12-13 | |||
| JP2007085702A | 2007-04-05 | |||
| JPS63502548A | 1988-09-22 | |||
| JP2002124483A | 2002-04-26 |
Attorney, Agent or Firm:
Takashi Otsubo
Sachiko Muraguchi
Sachiko Muraguchi