Title:
機能素子、機能素子の製造方法、機能素子の製造装置、制御プログラム及び記録媒体
Document Type and Number:
Japanese Patent JP7370770
Kind Code:
B2
Abstract:
To reduce unevenness in the ink film thickness when drying ink by airflow.SOLUTION: A functional element in which a first bank 7a and a second bank 7b are formed on a substrate 6 includes a capacitance unit 30 consisting of the first bank 7a, the second bank 7b, and the substrate. In a cross-section of the capacitance unit 30 viewed from a predetermined direction, a first angle between the first bank 7a and the substrate and a second angle between the second bank 7b and the substrate are different.SELECTED DRAWING: Figure 5
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Inventors:
Yuusuke Osako
Norihiko Ochi
Atsushi Ishikura
Hisashi Shibata
Norihiko Ochi
Atsushi Ishikura
Hisashi Shibata
Application Number:
JP2019158965A
Publication Date:
October 30, 2023
Filing Date:
August 30, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
H10K59/122; F26B5/14; H10K59/00; H10K59/35; H10K71/13; H10K71/20; H10K71/40
Domestic Patent References:
JP2017102187A | ||||
JP2003297569A | ||||
JP2013215732A | ||||
JP2009009847A |
Foreign References:
WO2012049718A1 | ||||
WO2011001644A1 |
Attorney, Agent or Firm:
Takuma Abe
Sougo Kuroiwa
Sougo Kuroiwa
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