To reduce influences of disturbance factors in an electromagnetic gyroscope sensor.
A bias electric line 13 and a detection electric line 14 are made up in a movable ring 12 being a ring-like vibrator, and alternating current is applied to the bias electric line 13, while applying a bias magnetic field in the axis direction (Z) of the movable ring 12 by using a permanent magnet disposed in the above axis direction, in order to produce Lorentz force according to Fleming's left-hand rule, thereby making the movable ring 12 expanded and contracted concentrically at a predetermined resonance frequency. When an angular speed about the axis of the movable ring 12 is applied in this condition, the movable ring 12 is deformed, and Coriolis force is detected from changes which are caused by the above deformation, in resistance values of piezoresistive elements R1-R4 making up the detection electric line, and the angular speed is calculated based on the Coriolis force and the resonance frequency. Consequently, since concentric bias vibrations are produced in the ring-like structure, the gyroscope sensor can be made up so that the disturbance factors hardly influence it.
| JP2006266969 | TUNING FORK TYPE PIEZO-ELECTRIC OSCILLATING GYROSCOPE |
| WO/2002/103368 | SILICON DEVICE |
| JP3061864 | [Title of Invention] Micromechanical Rotation Speed Sensor |
SAKAMOTO SHINJI
| JP2001508537A | 2001-06-26 | |||
| JP2000081336A | 2000-03-21 | |||
| JPH11281366A | 1999-10-15 | |||
| JPH10267667A | 1998-10-09 | |||
| JPH10160483A | 1998-06-19 | |||
| JPH0989569A | 1997-04-04 | |||
| JPH06241816A | 1994-09-02 | |||
| JP2001194148A | 2001-07-19 | |||
| JPH0642971A | 1994-02-18 |
Takao Ito
Jiro Higuchi