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Title:
HARD FILM EXCELLENT IN WEAR RESISTANCE AND HARD FILM- COATED MEMBER
Document Type and Number:
Japanese Patent JP3836640
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a hard film excellent in wear resistance and adhesion and to provide a hard film-coated member in which the hard film has been formed.
SOLUTION: This hard film is formed on the surface of a base material, the compsn. of a 1st layer formed on the base material side is composed of (AlxTi1-x) (NyC1-y), where 0.25≤x≤0.75 and 0.6≤y≤1, and the compsn. of a 2nd layer laminated on the surface side is composed of (VuTi1-u) (NvC1-v), where 0.25≤u≤0.75 and 0.6≤v≤1. Moreover, desirably, on the space between the 1st layer and the 2nd layer, an intermediate layer composed of the group 4a, 5a and 6a metals (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and W) is formed at a thickness of ≤500 nm or an intermediate layer composed of VxTiy (where 0≤x≤1, 0≤y≤1 and x+y=1) is formed at a thickness of ≤500 nm to obtain more excellent adhesion.


Inventors:
Yasuyuki Yamada
Taichi Aoki
Yusuke Tanaka
Kitaura Seiichiro
Yasutaka Okazaki
Natsuki Ichinomiya
Motomoto Matsumoto
Koichi Maeda
Toshiki Sato
Tatsuya Yasunaga
Kenji Yamamoto
Application Number:
JP26082499A
Publication Date:
October 25, 2006
Filing Date:
September 14, 1999
Export Citation:
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Assignee:
Mitsubishi Materials Kobe Tools Co., Ltd.
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
B23B27/14; C23C14/06; (IPC1-7): C23C14/06; B23B27/14
Domestic Patent References:
JP2000061708A
Attorney, Agent or Firm:
Kyuichi Ueki
Etsushi Kotani