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Title:
コーティング装置及び遮蔽プレートを有するコーティング装置の操作方法
Document Type and Number:
Japanese Patent JP5657029
Kind Code:
B2
Abstract:
A device for treating a substrate (12) includes a conveying device (13) for loading and unloading substrates or masks (10, 10′, 10″, 10″′) into and from a process chamber (1) through loading openings (6, 7). A shielding plate (11), used to shield the substrate (12) or the mask (10) from the influence of heat is moved between a shielding position and a storage position during the substrate treatment and, after the substrate (12) is treated, from the storage position back into the shielding position. In the storage position, the shielding plate (11) is situated inside a storage chamber (2, 3).

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Inventors:
シュトラウヒ、ゲルハルト・カール
フランケン、ヴァルター
コルベルク、マーセル
キッテル、フロレンツ
ゲルスドルフ、マルクス
ケッペラー、ヨハネス
Application Number:
JP2012553260A
Publication Date:
January 21, 2015
Filing Date:
February 08, 2011
Export Citation:
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Assignee:
アイクストロン、エスイー
International Classes:
C23C14/12; C23C14/04; C23C14/54; C23C14/56; H01L21/31; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Islet Takagi 郎
Noriko Kawai
South Toshihiro



 
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