【発明の名称】シリコン単結晶引き上げ用石英ガラスルツボとその製造方法

Title:

【発明の名称】シリコン単結晶引き上げ用石英ガラスルツボとその製造方法

Document Type and Number:

Japanese Patent JP2933404

Kind Code:

B2

Abstract:

A quartz glass crucible for use in a process for pulling a single crystal silicon and having an outer layer (3) and an inner layer (4). The outer layer (3) contains less than 0.3 ppm each of Na, K and Li and more than 5 ppm of Al. The outer layer (3) further contains bubbles to present an opaque appearance. The inner layer (4) is made by melting powders of high purity non-crystalline synthetic silica and contains less then 200 ppm of OH group. There is also disclosed a method for producing the crucible.

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Inventors:

MATSUMURA MITSUO
MATSUI HIROSHI

Application Number:

JP9386191A

Publication Date:

August 16, 1999

Filing Date:

April 24, 1991

Export Citation:

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