Title:
【発明の名称】基板の液切り装置
Document Type and Number:
Japanese Patent JP2850806
Kind Code:
B2
Inventors:
YAMAMORI AKYOSHI
Application Number:
JP27732895A
Publication Date:
January 27, 1999
Filing Date:
October 25, 1995
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
F26B15/00; F26B21/00; H01L21/304; (IPC1-7): H01L21/304; F26B15/00; F26B21/00
Domestic Patent References:
| JP4123532U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)