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Title:
【発明の名称】真空処理装置及び該装置により目的処理物を得る方法
Document Type and Number:
Japanese Patent JP2891160
Kind Code:
B2
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Inventors:
SASAMURA YOSHITAKA
MATSUDA KOJI
Application Number:
JP2819996A
Publication Date:
May 17, 1999
Filing Date:
February 15, 1996
Export Citation:
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Assignee:
NITSUSHIN DENKI KK
International Classes:
C23C16/50; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; H01L21/683; H01L21/687; (IPC1-7): H01L21/3065; C23C16/50; C23F4/00; H01L21/205; H01L21/31; H01L21/68
Domestic Patent References:
JP6169008A
JP59122922A
Attorney, Agent or Firm:
Tanigawa Masao



 
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