インプリント用モールド及びインプリント方法

Title:

インプリント用モールド及びインプリント方法

Document Type and Number:

Japanese Patent JP6476780

Kind Code:

B2

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Inventors:

Keita Iimura
Okawa Yasuo
Naoko Nakata

Application Number:

JP2014232101A

Publication Date:

March 06, 2019

Filing Date:

November 14, 2014

Export Citation:

Assignee:

Dai Nippon Printing Co.,Ltd.

International Classes:

H01L21/027; B29C33/38; B29C59/02; G02B5/30

Domestic Patent References:

Foreign References:

US20100148407

Attorney, Agent or Firm:

Hiroyuki Nagai
Hirohito Katsunuma
Yukihiro Hotta
Takuhisa Murata

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