Title:
質量分析用イオン検出装置、イオン検出方法、およびイオン検出装置の製造方法
Document Type and Number:
Japanese Patent JP5175388
Kind Code:
B2
Abstract:
The present disclosure provides an ion detector for improving the effect of electric field for pulling in an ion to be detected to a first-stage electrode of a secondary electron multiplier (SEM), and improving the effect of a stray light reduction. In one example embodiment, an ion detector includes a SEM, and a lead-in electrode for pulling in an ion to a first-stage electrode side of the SEM. At least one of the area of the lead-in electrode and a potential difference between the lead-in electrode and neighboring electrodes of the lead-in electrode, the neighboring electrode being an electrode not of the SEM, is set so that the light amount of internal-stray light generated inside the detector entering the first-stage electrode is not more than that of external-stray light generated outside the detector entering the first-stage electrode, when an ion is introduced into the detector.
Inventors:
Megumi Nakamura
Yoshiro Shiokawa
Strong
Yoshiro Shiokawa
Strong
Application Number:
JP2011511233A
Publication Date:
April 03, 2013
Filing Date:
April 30, 2009
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01J43/18; G01T1/28; H01J49/06
Domestic Patent References:
| JPH08138621A | 1996-05-31 | |||
| JPH06267497A | 1994-09-22 | |||
| JPH087829A | 1996-01-12 | |||
| JPH03289037A | 1991-12-19 |
Attorney, Agent or Firm:
Okabe
Katsumi Miyama
Katsumi Miyama