To perform temperature control of a processing object precisely by detecting the temperature precisely even the light penetrated the processing object is incident on a pyrometer in lamp anneal equipment equipped with a pyrometer.
Prior to performing heat treatment, transmissivity of a processing object 11 is determined. With reference to the output from a pyrometer 14 when the light from an upper lamp 12 enters under a state where the processing object 11 does not exist, the ratio of output from the pyrometer when the light penetrated the processing object 11 enters is determined as the transmissivity. The transmissivity thus determined is stored in a storage section 17 and when heat treatment is performed, output from the pyrometer 14 is corrected based on the transmissivity. Consequently, high precision temperature detection and temperature control can be attained.
Shuichi Fukuda
Takashi Sasaki
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