Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
LASER SCRIBING DEVICE
Document Type and Number:
Japanese Patent JP2008229714
Kind Code:
A
Abstract:

To provide a device capable of conducting a laser scribing treatment, when a film is formed on one face of a to-be-cleaved substrate, while placing the substrate on a suction table with the other face, on which a film is not formed, facing the side of a scribing head without bringing the suction table into contact with the surface of the film formed on the to-be-cleaved substrate.

A rib protrusion 441 is arranged on a suction table 431 so that contact between the suction table and the surface of the film formed on the to-be-cleaved substrate or a specified area in the surface is avoided. Then, the to-be-cleaved substrate is placed on the protrusion.


More Like This:
JP2016175122REVERSIBLE WORKBED SUPPORT MEMBERS FOR LASER CUTTING MACHINE
JP2548284[Name of invention] Mechanism for removing molten metal debris in a laser processing apparatus
JPS51145097LASER WORKING DEVICE
Inventors:
UEHARA YUKIHIRO
UCHIGATA TOMOO
MURATA HIROYUKI
INAKA CHIGUSA
KANAZAWA AKIHIRO
Application Number:
JP2007077468A
Publication Date:
October 02, 2008
Filing Date:
March 23, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TORAY ENG CO LTD
International Classes:
B23K26/10; B23K26/364; B28D5/00; C03B33/09



 
Previous Patent: LASER SCRIBING METHOD AND DEVICE THEREFOR

Next Patent: LASER SCRIBING APPARATUS