Title:
光源装置及びそれを用いた露光装置
Document Type and Number:
Japanese Patent JP4963149
Kind Code:
B2
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Inventors:
Mizoguchi
Application Number:
JP2001285025A
Publication Date:
June 27, 2012
Filing Date:
September 19, 2001
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H05G2/00; H05H1/24; G03F7/20; H01L21/027
Domestic Patent References:
| JP8334803A | ||||
| JP2001035688A | ||||
| JP2000349380A | ||||
| JP2001223429A | ||||
| JP2000357838A | ||||
| JP5275781A | ||||
| JP5283781A | ||||
| JP6181358A | ||||
| JP6222300A | ||||
| JP2001006896A | ||||
| JP10503887A | ||||
| JP2000271776A | ||||
| JP2000066104A |
Attorney, Agent or Firm:
Masaaki Utsunomiya
Harada victory
Harada victory