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Title:
LIGHT SOURCE DEVICE, PROJECTION ALIGNER, METHOD FOR MANUFACTURING PROJECTION ALIGNER, AND DEVICE- MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2002050815
Kind Code:
A
Abstract:

To efficiently generate light in specific wavelength with a simple configuration.

Phosphate glass or bismuth oxide glass is used as a main material, and an optical waveguide member 175 where rare earth elements have been added with high density is used, thus composing an optical amplifier 167, thus amplifying incidence light with a high amplification rate by the short optical waveguide member 175. As a result, the change in polarization generated through the optical waveguide is reduced, and at the same time high-intensity light can be supplied to a wavelength converter 163. Also, since the length of a path where light passes for amplification becomes short, thus also inhibiting the spread of spectrum by induction Raman scattering and self phase modulation, thus efficiently generating wavelength conversion light at a narrow bandwidth with a simple configuration.


Inventors:
OTSUKI TOMOKO
DOI MASAAKI
Application Number:
JP2000190826A
Publication Date:
February 15, 2002
Filing Date:
June 26, 2000
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F7/20; G02F1/37; H01L21/027; H01S3/06; H01S3/10; (IPC1-7): H01S3/10; G02F1/37; G03F7/20; H01L21/027; H01S3/06
Attorney, Agent or Firm:
Atsushi Tateishi