Title:
LIGHT SOURCE UNIT AND IRRADIATION UNIT
Document Type and Number:
Japanese Patent JP2003163393
Kind Code:
A
Abstract:
To provide a light source unit which can efficiently obtain light of high luminance in a simple configuration.
An optical amplifier medium 171 is arranged on the optical path of light of stimulation light wavelength of an optical resonator 135 relating to the light of the stimulation light wavelength different from the wavelength of amplified light that a laser oscillator 130 has. Consequently, the optical amplifier medium 171 is supplied with very intense stimulation light. Light having the wavelength of the amplified light can, therefore, be amplified with a high gain and amplified light with high luminance can be emitted.
Inventors:
TOKUHISA AKIRA
Application Number:
JP2001359446A
Publication Date:
June 06, 2003
Filing Date:
November 26, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; G02F1/35; G02F1/37; H01L21/027; H01S3/06; H01S3/094; H01S3/109; H01S3/131; H01S3/30; (IPC1-7): H01S3/06; G02F1/35; G02F1/37; G03F7/20; H01L21/027; H01S3/094; H01S3/109; H01S3/131; H01S3/30
Attorney, Agent or Firm:
Atsushi Tateishi