Title:
直線真空堆積システム
Document Type and Number:
Japanese Patent JP2008544485
Kind Code:
A
Abstract:
Embodiments of a vacuum conveyor system are provided herein. In one embodiment a vacuum conveyor system includes a first vacuum sleeve having a plurality of rollers that support and move substrates through the first vacuum sleeve. A port is provided for sealably coupling the first vacuum sleeve to a process chamber. A first substrate handler is disposed proximate the port. Multiple ports may be provided for sealably coupling the first vacuum sleeve to a plurality of process chambers. A dedicated substrate handler is provided for each process chamber. A second vacuum sleeve may be sealably coupled to an opposing side of the process chambers. The vacuum conveyor system may be modular with independent modules linked via load lock chambers. The plurality of rollers may compensate for any sag of the leading edge of a substrate being transported thereupon.
Inventors:
Bronigan Wendel Tea
White John M
White John M
Application Number:
JP2008515686A
Publication Date:
December 04, 2008
Filing Date:
March 14, 2006
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/677; B65G49/06; C23C14/50; C23C14/56; C23C16/44
Domestic Patent References:
| JPH0778858A | 1995-03-20 | |||
| JP2001019158A | 2001-01-23 | |||
| JP2004179567A | 2004-06-24 | |||
| JP2003077976A | 2003-03-14 | |||
| JP2004292094A | 2004-10-21 | |||
| JP2004189443A | 2004-07-08 | |||
| JP2004077592A | 2004-03-11 | |||
| JP2005534176A | 2005-11-10 |
Attorney, Agent or Firm:
Yoshiaki Anzai
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