Title:
LIQUI D METAL ION SOURCE
Document Type and Number:
Japanese Patent JP2003132810
Kind Code:
A
Abstract:
To provide a liquid metal ion source capable of emitting stable ion beams.
This liquid metal ion source has a screen on two current-fed terminals respectively, by which each joined portion between a current-fed terminal and an insulator is hidden as seen from a needle-like electrode or a storage portion.
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Inventors:
KUDO NAOYA
TERUI YOSHINORI
TERUI YOSHINORI
Application Number:
JP2001324638A
Publication Date:
May 09, 2003
Filing Date:
October 23, 2001
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
G21K5/04; H01J27/26; H01J37/08; (IPC1-7): H01J27/26; G21K5/04; H01J37/08
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