To eliminate deviation in the machining dimensions and pitch of holes and trenches and occurrence of bur around an ejection opening while keeping a desired size of the holes and trenches without increasing the machining time by varying the energy density per unit time of laser light being projected to a work.
A work W is trenched or bored by projecting a laser light L while varying the energy density thereof per unit time. For example, a laser light L having a high energy density per unit time is employed until completion of trenching an ink channel or boring a liquid ejection opening and the energy density is lowered to a level causing no deformation of resin nor occurrence of bur immediately before completion of trenching or boring. According to the method, an ejection opening of desired size or a liquid channel of desired depth can be machined accurately.
ISHIMATSU SHIN
GOTO AKIRA
ITO YOSHINORI
FURUKAWA MASAAKI
INABA MASAKI
SAITO AKIO
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