Title:
LIQUID JET HEAD, LIQUID JET DEVICE, PIEZOELECTRIC ELEMENT, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2014172178
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a liquid jet head which inhibits peeling of an electrode and a wiring layer thereby inhibiting damages of a piezoelectric layer and reducing the costs, and to provide a liquid jet device, a piezoelectric element, and a manufacturing method of the piezoelectric element.SOLUTION: A liquid jet head includes: a passage formation substrate 10 having a pressure generation chamber which communicates with a nozzle opening 21 for jetting a liquid; a piezoelectric element 300 including a piezoelectric layer 70 provided on the passage formation substrate 10, electrodes 60, 80, and a wiring layer 90 connected with the electrodes 60, 80. The wiring layer 90 includes: a first layer 191 which is formed at the passage formation substrate 10 side by pretreatment and includes palladium; and a second layer 192 which is formed on the first layer 191 by electroless plating and includes nickel.
Inventors:
FURUYA NOBORU
Application Number:
JP2013043531A
Publication Date:
September 22, 2014
Filing Date:
March 05, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/045; B41J2/055; B41J2/16; H01L41/047; H01L41/09; H01L41/29
Domestic Patent References:
| JPH0953183A | 1997-02-25 | |||
| JP2003094632A | 2003-04-03 | |||
| JP2009152557A | 2009-07-09 | |||
| JP2006283165A | 2006-10-19 | |||
| JP2001334673A | 2001-12-04 | |||
| JP2007050638A | 2007-03-01 | |||
| JPH10315469A | 1998-12-02 | |||
| JP2007331135A | 2007-12-27 | |||
| JP2002529289A | 2002-09-10 | |||
| JPH0953183A | 1997-02-25 | |||
| JP2003094632A | 2003-04-03 | |||
| JP2009152557A | 2009-07-09 | |||
| JP2006283165A | 2006-10-19 | |||
| JP2001334673A | 2001-12-04 | |||
| JP2007050638A | 2007-03-01 | |||
| JP2001030496A | 2001-02-06 |
Attorney, Agent or Firm:
Hiroyuki Kurihara
Katsutoshi Muranaka
Katsutoshi Muranaka