Title:
LIQUID RAW MATERIAL FEEDER
Document Type and Number:
Japanese Patent JP3727146
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a liquid raw material feeder for replenishing and replacing a liquid raw material easily and quickly and also controlling the generation of waste of the liquid raw material to the minimum.
SOLUTION: A liquid raw material feeder is provided with pipe joints 18a, 18b, 26a and 26b connecting removably a supply source piping 14 extending from a supply source container 12 with a supply sink piping 22, and a closing mechanism 16 is provided in the vicinity of the ends of the supply sink piping 14 and the piping to be made-up 22, and a discharge piping 62 for discharging a piping cleaning fluid is provided on the end side of the piping joint of either of the supply source pipe 14 or the supply sink piping 22.
Inventors:
Kuniaki Horie
Mitsunao Shibasaki
Yuji Araki
Hidenao Suzuki
Mitsunao Shibasaki
Yuji Araki
Hidenao Suzuki
Application Number:
JP18448497A
Publication Date:
December 14, 2005
Filing Date:
June 25, 1997
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B01J4/00; (IPC1-7): B01J4/00
Domestic Patent References:
| JP7268639A | ||||
| JP7000334A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Susumu Ohata
Shintaro Hotta
Susumu Ohata
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